3D Strong offers
chemical vapor deposition reactor CVD-4A with the system of injected liquid reagents for the synthesis of
arrays of aligned carbon nanotubes (CNTs). The produced materials are aligned
(perpendicular to the substrate) long carbon nanotubes with the length from 40
microns to 8000 microns. CVD-4A reactors are successfully used in industry and research centers and all over the
world. There are new features in the upgraded version of the reactor such as
some automation of the growth process, ability of adapting the system to
graphene synthesize on polycrystalline copper substrates, changes in design.
Usage.
·
synthesis of nanostructured layers of carbon, in
particular, arrays of carbon nanotubes and their composites on various
substrates, including semiconductor structures
·
design elements of micro and nanoelectronics,
microsystems technology, in particular, the integrated, complex micro- and
nanosensors.
Main
characteristics
Reactor:
● plasmaless process, thermal
synthesis (~ 800 0 C);
● synthesis of carbon
nanostructures at atmospheric pressure in a stream of inert gas;
● aerosol spray techniques of
the reaction mixture in the synthesis zone;
● manipulator system for the synthesis acceleration and extraction
of the finished sample;
● preparing and mixing system
transport (inert) and reactive gases with a high precision;
● system for data collecting,
monitoring and processing to adjust parameters optimal for the synthesis of
carbon nanostructures.
Arrays of carbon nanotubes:
● high density of CNTs;
● high growth rate;
● obtaining long CNTs (> 7.5
mm) for electrochemical applications;
● minimum dispersion of CNT diameter;
● modification and
functionalization of CNT graphite
structure.
Specifications:
Reactor CVD-4A main blocks:
● reactor reinforced frame ;
● electric oven with an
electronic control unit;
● tube reactor with flanges for samples
and working gases insertions;
● cooling flanges system ;
● dual-channel gas system;
● control system of vapors of
organic compounds input ;
● vacuum pumping system of the
reactor;
● unit of control and power voltage distribution;
Operation at an ambient temperature of 0 - 50 ° C and
relative humidity of 30 - 80%.
Technical
characteristics:
Reactor:
● range of operating
temperatures: from 200 0C to
1100 0C;
● maximum temperature: 1150
0 C;
● standard temperature accuracy:
± 1.0 0 C;
● instability of temperature regime
0C/min, not over: 0.2%;
● time to a setpoint temperature
: 40 min ;
● length of the working area:
150 mm;
● preliminary vacuum: 10-2
Torr.
● inert gas used: argon,
nitrogen (high purity);
● reactor flanges cooler : cycling water;
● reactor size, not more: 1700mm
x 1650mm x 650mm;
● reactor weight: 180 kg;
● power consumption, not more:
4kW;
● powered by a three-phase AC voltage
of 380V, 50Hz.
Supplying liquid reagents through the nozzle
evaporator:
● filing accuracy: better than 2 microliters.
Maximum substrates size: 40x40 mm2
Automatic
control system (ACS) for CVD-reactor
● automation of process control
for synthesis of carbon nanotubes;
● monitoring the physical
parameters of the CVD-reactor in real time;
● visualization of selected
parameters of the synthesis of carbon nanotubes on a on screen display;
● possibility of increasing the
input-output channels number, adapting to new versions of the CVD-reactor;
● providing safe shutdown of the
CVD-reactor in case of emergency.
Methodological
support
● 12-month warranty at the
installation location;
● installation and
training: 7-10 days;
● delivery time: 3 months;
● CE marking.
